000 00293nam a2200109Ia 4500
008 171124s9999||||xx |||||||||||||| ||und||
020 _a978-0070487093
100 _aHSU TAI RAN
245 0 _aMEMS AND MICROSYSTEMS DESIGN AND MANUFACTURE
260 _aNEW DELHI
_bT.M.H PUBLISHER-1
_c2002
300 _a436
942 _cLEN_BK
999 _c740
_d740