000			00326nam a2200133Ia 4500
008			180112s9999||||xx |||||||||||||| ||und||
020			_a81-82282027
082			_a620.5
100			_aFUJITA H
245		0	_aMICROMACHINES AS TOOLS FOR NANOTECHNOLOGY
260			_aNEWYARK _bSPRINGER _c2003
300			_a211
650			_aNanotechnology
942			_cGEN_BK
999			_c5301 _d5301