000 00383nam a2200133Ia 4500
008 180112s9999||||xx |||||||||||||| ||und||
020 _a9780849391385
082 _a621.381 21
100 _aGAD EL HAK MOHAMED
245 4 _aTHE MEMS HAND BOOK DESIGN AND FABRICATION
260 _aLONDON
_bTAYLOR AND FRANCIS
_c2006
300 _a14.19+I-17
650 _a"Digital electronics,Microelectronics"
942 _cGEN_BK
999 _c4875
_d4875