000 nam a22 7a 4500
999 _c15186
_d15186
020 _a9780070487093
082 _a621.38121
_bHSU
100 _aTAI RAN HSU
245 _aMEMS AND MICROSYSTEMS DESIGN AND MANUFACTURE
260 _aNEW DELHI
_bM.G.H.PUB
_c2016
300 _a436
_bP.B
942 _cGEN_BK