000 00344nam a2200121Ia 4500
008 180115s9999||||xx |||||||||||||| ||und||
082 _a621.381 21
100 _aAXELSON JAN
245 0 _aMEMS AND MICROSYSTEMS DESIGN AND MANUFACTURE
260 _aNEW DELHI
_bT.M.H PUBLISHER-1
_c2006
300 _a436
650 _a"Digital electronics,Microelectronics"
942 _cGEN_BK
999 _c12477
_d12477