CAMPBELL STEPHAN A <br/><br/>
THE SCIENCE AND ENGINEERING OF MICROELECTRONICS FABRICATION 

 - Second 
 - NEWYARK  OXFORD  2004 
 - 603 
<br/><br/><label>ISBN: </label>9780198084808 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics
<br/><br/><label>Dewey Class. No.: </label>621.3817